SURAGUS to perform live measurement at SEMICON Europe
Verfasser: pr-gateway on Tuesday, 6 October 2015Non-Contact Sheet Resistance Measurement Systems
SURAGUS is demonstrating a non-contact live measurement of non-contact wafer sheet resistance at the SEMICON Europe 2015. The wafer will be moved during cluster processing through a sheet resistance measuring station. The applied wafer handling system is a new development by specialist Adenso. The measured sheet resistance single-point or line scan solution provides high accuracy and sample rate for in- and ex-vacuo applications.
The SEMICON Europe is the leading trade fair for the semiconductor industry, plastic electronics and photovoltaics, 06 - 08 October in Dresden.
Meet SURAGUS at Silicon Saxony booth 2046.